VMB(Valve Manifold Box)

The equipment to furcate the Precursor supplied from the outside into the number of LDS and deliver it safely to LDS using Carrier Gas



VMB(Valve Manifold Box)

The equipment to furcate the Precursor supplied from the outside into the number of

LDS and deliver it safely to LDS using Carrier Gas

System Characteristics

- Fully-automatic system by PLC control

- Easy control with Touch Monitor

- Installed a safety device according to the characteristics of 

   Precursor(has, flame, smoke, temperature, etc)- Precursor 

- Interlock to prevent tampering

- System Error and Alarm history

- Support comunication with Process equipments

- Explosion-proof product

- Able to equip a fire extinguisher

UCHEM T-30

ItemManual
Model
UCHEM T-30 (VMB)
Refill Type
External or Bulk Supply Device
Size

900(W) x 750(D) x 1,800(H)

Supply Line
Maximum 10 Stick
Applicable Chemicals
TEB, TEOS, TEPO, etc