The equipment to furcate the Precursor supplied from the outside into the number of LDS and deliver it safely to LDS using Carrier Gas
VMB(Valve Manifold Box)
The equipment to furcate the Precursor supplied from the outside into the number of
LDS and deliver it safely to LDS using Carrier Gas
System Characteristics
- Fully-automatic system by PLC control
- Easy control with Touch Monitor
- Installed a safety device according to the characteristics of
Precursor(has, flame, smoke, temperature, etc)- Precursor
- Interlock to prevent tampering
- System Error and Alarm history
- Support comunication with Process equipments
- Explosion-proof product
- Able to equip a fire extinguisher
UCHEM T-30
Item | Manual |
---|---|
Model | UCHEM T-30 (VMB) |
Refill Type | External or Bulk Supply Device |
Size | 900(W) x 750(D) x 1,800(H) |
Supply Line | Maximum 10 Stick |
Applicable Chemicals | TEB, TEOS, TEPO, etc |