Filling System
The equipment to supply certain amount of chemicals to Canister from the External Bulk Storage Tank
It measures precise amount of chemicals with the precise scale to supply
| Item | Manual |
|---|---|
| Model | Filling System |
| Refill Type | Bulk to process |
| Size | 5,000(W) x 1,470(D) x 2,600(H) |
| Applicable Chemicals | 4MS, HCDS, TEOS, OMCTS, etc |
| Storage Capacity | 2L~200L |
FCHEM T-20
Unlike general LSD Equipments, the material of the pipe is PFA and it is
a proper equipment to deliver highly corrosive chemicals
| Item | Manual |
|---|---|
| Model | FCHEM T-20 |
| Refill Type | Bulk to Process |
| Supply Line | Max 4 Stick |
| Remains Control | Weight Scale, Ultrasonic Sensor |
| Size | 500(W) x 650(D) x 2,000(H) |
| Applicable Gas | DCE, TRANS1, TRANS2, etc |
