The equipment to deliver Precursor which is used in semiconductor manufacturing process to the Main System Process Equipments steadily and constantly with constant pressure using Carrier Gas
System Characteristics
- Fully-automatic system by PLC control
- Easy control with Touch Monitor
- Installed a safety device according to the characteristics of
Precursor(has, flame, smoke, temperature, etc)
- Interlock to prevent tampering
- System Error and Alarm history
- Support comunication with Process equipments
- Explosion-proof product
- Able to equip a fire extinguisher
UCHEM T-50
| Item | Manual |
|---|---|
| Model | T-50(LDS) |
| Refill Type | Bulk to Process, External Supply Device |
| Size | 750(W) x 750(D) x 2,000(H) |
| Supply Line | Max 4 Stick |
| Remains Control | Weight Scale, Ultrasonic Sensor |
| Applicable Gas | TEOS, HCDS, SP-6, LTO520, OMCTS, 3DMAS, TiCI4, etc |
| Storage Capacity | 2L~38L |
3CHEM T-50
| Item | Manual |
|---|---|
| Model | 3CHEM T-50 (LDS) |
| Refill / Supply Method | Bulk to Process, External or Bulk Supply Device / 1Process Supply |
| Size | 1,300(W) x 700(D) x 2,080(H) |
| Supply Line | 3~12 Stick |
| Remains Control | Weight Scale, Ultrasonic Sensor |
| Applicable Chemicals | TEOS, TEB, TEPO, etc |
| Storage Capacity | 2L~19L |
