LDS(LIQUID DELIVERY SYSTEM)

The equipment to deliver Precursor which is used in semiconductor manufacturing process to the Main System Process Equipments steadily and constantly with constant pressure using Carrier Gas



System Characteristics

- Fully-automatic system by PLC control

- Easy control with Touch Monitor

- Installed a safety device according to the characteristics of

   Precursor(has, flame, smoke, temperature, etc)

- Interlock to prevent tampering

- System Error and Alarm history

- Support comunication with Process equipments

- Explosion-proof product

- Able to equip a fire extinguisher

UCHEM T-50

ItemManual
Model
T-50(LDS)
Refill Type
Bulk to Process, External Supply Device
Size

750(W) x 750(D) x 2,000(H)

Supply Line
Max 4 Stick
Remains Control

Weight Scale, Ultrasonic Sensor

Applicable Gas
TEOS, HCDS, SP-6, LTO520, OMCTS, 3DMAS, TiCI4, etc
Storage Capacity
2L~38L


3CHEM T-50

ItemManual
Model3CHEM T-50 (LDS)
Refill / Supply MethodBulk to Process, External or Bulk Supply Device / 1Process Supply
Size

1,300(W) x 700(D) x 2,080(H)

Supply Line
3~12 Stick
Remains Control
Weight Scale, Ultrasonic Sensor
Applicable Chemicals

TEOS, TEB, TEPO, etc

Storage Capacity2L~19L