The equipment to supply the special gas which is used in semiconductor manufacturing process to the Main System Process Equipments steadily and constactly
GDS(GAS DELIVERY SYSTEM)
The equipment to supply the special gas which is used in semiconductor
manufacturing process to the Main System Process Equipments steadily and constactly
System Characteristics
- Fully-automatic system by PLC control
- Installed a safety device according to the characteristics of Gas
- Support comunication with Process equipments
- Able to set up in an Explosion-proof area (Ex-ll C T4)
- Auto Change or Single Type
THREE G
| Item | Manual |
|---|---|
| Model | Three G |
| Refill / Supply Method | Automatic Supply Conversion Method |
| Size | Common 800(W) x 650(D) x 2,100(H) |
| Applicable Gas | SiH4, CH2F2, Si2H6, C4F6, BCl3, Cl2, HCl, ClF3, HBr, N2O, NF3 , etc |
