The equipment to deliver the Precursor in constant pressure from Bulk Precursor Storage to VMB or LDS equipment by Carrier Gas
BCD(Bulk Chemical Delivery)
The equipment to deliver the Precursor in constant pressure from Bulk Precursor Storage to
VMB or LDS equipment by Carrier Gas
System Characteristics
- Fully-automatic system by PLC control
- Easy control with Touch Monitor
- Installed a safety device according to the characteristics of
Precursor(has, flame, smoke, temperature, etc)
- Interlock to prevent tampering
- System Error and Alarm history
- Support comunication with Process equipments
- Explosion-proof product
UCHEM T-20
Item | Manual |
---|---|
Model | UCHEM T-20 (Auto change BCD) |
Refill Type | Bulk A, B Auto Cross Over Supply |
Size | 2,100(W) x 1,100(D) x 2,000(H) |
Supply Line | Max 6 Stick |
Remains Control | Weight Scale, Ultrasonic Sensor |
Applicable Chemicals | TMA, SiCl4, TeCl4, TEOS, TEPO, etc |
Storage Capacity | 200L |