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PRODUCT



ARS

The equipment to deliver Precursor which is used in semiconductor manufacturing process to the Main System Process Equipments steadily and constantly with constant pressure using Carrier Gas



System Characteristics

- Fully-automatic system by PLC control

- Easy control with Touch Monitor

- Installed a safety device according to the characteristics of 

   Precursor(has, flame, smoke, temperature, etc)

- Interlock to prevent tampering

- System Error and Alarm history

- Support comunication with Process equipments

- Explosion-proof product

- Able to equip a fire extinguisher

UCHEM T-70

Item
Manual
ModelUCHEM T-70 (ARS)
Refill / Supply MethodProcess A, B Canister Change / Process A, B Auto Cross Over Supply
Size

1,250(W) x 700(D) x 2,000(H)

Supply Line
3 Stick
Remains Control
Weight Scale, Ultrasonic Sensor
Applicable Gas

TEMAHf, TEMAZr, TMA, HBO, TEB, etc

Storage Capacity
2L~19L


UCHEM T-80

Item
Manual
ModelUCHEM T-80 (ARS)
Refill TypeBulk to Process / 2Process Supply
Size

1,090(W) x 780(D) x 2,030(H)

Supply Line
2 Stick
Remains Control
Weight Scale, Ultrasonic Sensor
Applicable Chemicals

ACP-2, ZAC, TMA, SSP, HBO, TEB, etc

Storage Capacity
2L~19L


UCHEM T-80 (one process)

ItemManual
ModelT-80(ARS)
Refill / Supply MethodBulk to Process / 1 Process Supply
Size

1,090(W) x 780(D) x 2,030(H)

Supply Line
4 Stick
Remains Control
Weight Scale, Ultrasonic Sensor
Applicable Chemicals

ACP-2, ZAC, TMA, SSP, HBO, TEA, etc

Storage Maximum Capacity19L